Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7062411 | Method for process control of semiconductor manufacturing equipment | John Scanlan, Kevin J. O'Leary, Marcus Carbery | 2006-06-13 |
| 7015703 | Radio frequency Langmuir probe | Paul Heynen | 2006-03-21 |
| 6826489 | Fault classification in a plasma process chamber | John Scanlan | 2004-11-30 |
| 6677246 | Endpoint detection in the etching of dielectric layers | John Scanlan | 2004-01-13 |
| 6501285 | RF current sensor | Ciaran O'Morain, Francisco Martinez | 2002-12-31 |
| 6469488 | Method of processing a high frequency signal containing multiple fundamental frequencies | Jean-Marc Overard | 2002-10-22 |
| 6061006 | Apparatus for sensing RF current delivered to a plasma with two inductive loops | — | 2000-05-09 |
| 5808415 | Apparatus for sensing RF current delivered to a plasma with two inductive loops | — | 1998-09-15 |