Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5478679 | Half-tone self-aligning phase shifting mask | Shyi-Long Shy, Hong-Tsz Pan, Ming-Tzong Yang, Guey-Chi Guo, Yueh-Lin Chou | 1995-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5478679 | Half-tone self-aligning phase shifting mask | Shyi-Long Shy, Hong-Tsz Pan, Ming-Tzong Yang, Guey-Chi Guo, Yueh-Lin Chou | 1995-12-26 |