Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7498105 | Method for checking phase shift angle of phase shift mask, lithography process and phase shift mask | Yung-Feng Cheng, Chin-Lung Lin | 2009-03-03 |
| 6492069 | Method for forming an attenuated phase-shifting mask | Ching-Liang Wu, Jen-Hui Tseng | 2002-12-10 |
| 6015641 | Reduction of optical proximity effect of bit line pattern in DRAM devices | — | 2000-01-18 |
| 5478679 | Half-tone self-aligning phase shifting mask | Wen-An Loong, Shyi-Long Shy, Hong-Tsz Pan, Ming-Tzong Yang, Guey-Chi Guo | 1995-12-26 |