Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6106378 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Eugene Gantvarg, Sen-Hou Ko | 2000-08-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6106378 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Eugene Gantvarg, Sen-Hou Ko | 2000-08-22 |