Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8716153 | Device and method for producing dielectric layers in microwave plasma | Wilfried Lerch, Thomas Theiler | 2014-05-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8716153 | Device and method for producing dielectric layers in microwave plasma | Wilfried Lerch, Thomas Theiler | 2014-05-06 |