Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8142675 | Compositions for chemical-mechanical planarization of noble-metal-featured substrates, associated methods, and substrates produced by such methods | Robert Small | 2012-03-27 |
| 7524346 | Compositions of chemical mechanical planarization slurries contacting noble-metal-featured substrates | Robert Small | 2009-04-28 |
| 7037350 | Composition for chemical-mechanical polishing and method of using same | Robert Small | 2006-05-02 |
| 6953391 | Methods for reducing slurry usage in a linear chemical mechanical planarization system | Sabir A. Majumder, Cangshan Xu | 2005-10-11 |
| 6492311 | Ethyenediaminetetraacetic acid or its ammonium salt semiconductor process residue removal composition and process | Wai Mun Lee | 2002-12-10 |
| 6367486 | Ethylenediaminetetraacetic acid or its ammonium salt semiconductor process residue removal process | Wai Mun Lee | 2002-04-09 |