Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374580 | Method for manufacturing shallow trench isolation | Jin Xu, Minjie Chen, Yu Ren | 2025-07-29 |
| 11972963 | Wafer transfer module and method thereof for transferring to-be-transferred wafer | Yu Ren, Jin Xu, Kaiqu Ang | 2024-04-30 |
| 11911809 | Preventive maintenance method for chamber of metal etching machine | Minjie Chen, Jin Xu, Yu Ren | 2024-02-27 |
| 9842743 | Method of etching a shallow trench | Jin Xu, Minjie Chen, Yu Ren, Yukun Lv | 2017-12-12 |
| 8900887 | Method for etching polysilicon gate | Chao Fang, Yukun Lv, HsuSheng Chang | 2014-12-02 |
| 8658502 | Method for reducing morphological difference between N-doped and undoped polysilicon gates after etching | Yukun Lv, Chao Fang, HsuSheng Chang | 2014-02-25 |