HC

HsuSheng Chang

SM Shanghai Huali Microelectronics: 8 patents #4 of 202Top 2%
Overall (All Time): #640,125 of 4,157,543Top 20%
8
Patents All Time

Issued Patents All Time

Showing 1–8 of 8 patents

Patent #TitleCo-InventorsDate
9991116 Method for forming high aspect ratio patterning structure Peng Liu, Qiyan Feng, Yu Ren, Yukun Lv, Jun Zhu 2018-06-05
9134122 Apparatus for detecting the flatness of wafer and the method thereof Wenliang Li, Lijun Chen, Jun Zhu 2015-09-15
8900887 Method for etching polysilicon gate Zaifeng Tang, Chao Fang, Yukun Lv 2014-12-02
8898598 Layout pattern modification method Chenming Zhang, Fang Wei 2014-11-25
8863045 Optical proximity correction method based on hybrid simulation model Han-Chiang Chen, Fang Wei, Zhihao Chu 2014-10-14
8822348 Dummy wafer structure and method of forming the same Chuan Ren, Zhi-Gang Wang 2014-09-02
8658502 Method for reducing morphological difference between N-doped and undoped polysilicon gates after etching Zaifeng Tang, Yukun Lv, Chao Fang 2014-02-25
8645879 Algorithm of Cu interconnect dummy inserting Jingxun Fang, YungChieh Fan 2014-02-04