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Method for manufacturing shallow trench isolation |
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Beam-slab integrated prefabricated waffle slab structure and construction method thereof |
Yajie Zhang, Siyuan Chi, Yujun Wu |
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Reinforced concrete composite beam structure based on precast concrete beam-slab integrated units and construction method thereof |
Siyuan Chi, Yajie Zhang, Yujun Wu |
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Wafer transfer module and method thereof for transferring to-be-transferred wafer |
Jin Xu, Kaiqu Ang, Zaifeng Tang |
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Preventive maintenance method for chamber of metal etching machine |
Minjie Chen, Jin Xu, Zaifeng Tang |
2024-02-27 |
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Method for forming high aspect ratio patterning structure |
Peng Liu, Qiyan Feng, Yukun Lv, Jun Zhu, HsuSheng Chang |
2018-06-05 |
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Method for forming shallow trenches of the dual active regions |
Quan Jing, Jin Xu, Minjie Chen, Yukun Lv, Jun Zhu +1 more |
2018-01-16 |
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Method of etching a shallow trench |
Jin Xu, Zaifeng Tang, Minjie Chen, Yukun Lv |
2017-12-12 |
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Method for establishing mapping relation in STI etch and controlling critical dimension of STI |
Jin Xu, Qiyan Feng, Yukun Lv, Xusheng Zhang |
2017-05-30 |
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Accuracy traceability method based on precision coordinate control network for workshop measurement positioning system |
Jigui Zhu, Jiarui LIN, Yongjie Ren, Linghui Yang |
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Aerated swirling vertical shaft with double volute chambers |
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2015-06-30 |