Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7572736 | Method of dry-etching semiconductor devices | Ji Soo Kim, Chang-Jin Kang | 2009-08-11 |
| 7297466 | Method of forming a photoresist pattern and method for patterning a layer using a photoresist | Sung Ho Lee, Sang-Gyun Woo, Ji Soo Kim | 2007-11-20 |
| 6835970 | Semiconductor device having self-aligned contact pads and method for manufacturing the same | Dong-Seok Nam, Ji Soo Kim | 2004-12-28 |
| 6478872 | Method of delivering gas into reaction chamber and shower head used to deliver gas | In-Sang Jeon, Sang-Bom Kang, Sang In Lee, Kyu Wan Ryu | 2002-11-12 |
| 6458701 | Method for forming metal layer of semiconductor device using metal halide gas | Sang-Bom Kang, Gil-Heyun Choi, In-Sang Jeon | 2002-10-01 |
| 6372598 | Method of forming selective metal layer and method of forming capacitor and filling contact hole using the same | Sang-Bum Kang, Sang In Lee, Hyun-Seok Lim, Mee-Young Yoon | 2002-04-16 |
| 6197683 | Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact of semiconductor device using the same | Sang-Bom Kang, Chang-Soo Park, Sang In Lee | 2001-03-06 |
| 6174809 | Method for forming metal layer using atomic layer deposition | Sang-Bom Kang, Chang-Soo Park, Sang In Lee | 2001-01-16 |