Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495467 | Method and apparatus for etching thin layer | Jung Suk GOH, Jae Seong LEE, Do Youn LIM, Kuk Saeng KIM, Young Dae CHUNG +12 more | 2022-11-08 |
| 10777458 | Method of filling a via hole and apparatus for performing the same | Mong Ryong Lee | 2020-09-15 |