Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262866 | Indium phosphide smoothing and chemical mechanical planarization processes | Henry A. Beveridge, Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Dinesh Kumar Penigalapati, Rachel S. Steiner +2 more | 2019-04-16 |
| 9916985 | Indium phosphide smoothing and chemical mechanical planarization processes | Henry A. Beveridge, Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Dinesh Kumar Penigalapati, Rachel S. Steiner +2 more | 2018-03-13 |
| 9890300 | Germanium smoothing and chemical mechanical planarization processes | Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Dinesh Kumar Penigalapati, Rachel S. Steiner, James A. Tornello +1 more | 2018-02-13 |
| 9646841 | Group III arsenide material smoothing and chemical mechanical planarization processes | Henry A. Beveridge, Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Dinesh Kumar Penigalapati, Rachel S. Steiner +2 more | 2017-05-09 |
| 9646842 | Germanium smoothing and chemical mechanical planarization processes | Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Dinesh Kumar Penigalapati, Rachel S. Steiner, James A. Tornello +1 more | 2017-05-09 |