Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8809778 | Pattern inspection apparatus and method | Ryuichi Ogino, Soichi Shida | 2014-08-19 |
| 8779359 | Defect review apparatus and defect review method | Isao Yonekura | 2014-07-15 |
| 8675948 | Mask inspection apparatus and mask inspection method | Tsutomu Murakawa | 2014-03-18 |
| 8559697 | Mask inspection apparatus and image generation method | Tsutomu Murakawa | 2013-10-15 |
| 8507858 | Pattern measurement apparatus and pattern measurement method | Hiroshi Fukaya | 2013-08-13 |
| 8431895 | Pattern measuring apparatus and pattern measuring method | Jun Matsumoto | 2013-04-30 |
| 8071943 | Mask inspection apparatus and image creation method | Tsutomu Murakawa, Toshimichi Iwai, Jun Matsumoto, Takayuki Nakamura | 2011-12-06 |
| 6546154 | Image detection method and length measurement apparatus | Jun Matsumoto | 2003-04-08 |
| 5999005 | Voltage and displacement measuring apparatus and probe | Akira Fujii, Yoko Sato, Soichi Hama, Kazuyuki Ozaki, Yoshiro Goto +1 more | 1999-12-07 |
| 5677635 | Voltage and displacement measuring apparatus and probe | Akira Fujii, Yoko Sato, Soichi Hama, Kazuyuki Ozaki, Yoshiro Goto +1 more | 1997-10-14 |