| 8809778 |
Pattern inspection apparatus and method |
Ryuichi Ogino, Yoshiaki Ogiso |
2014-08-19 |
| 7791022 |
Scanning electron microscope with length measurement function and dimension length measurement method |
Takayuki Nakamura, Toshimichi Iwai, Mitsuo Hiroyama |
2010-09-07 |
| 5821761 |
Apparatus detecting an IC defect by comparing electron emissions from two integrated circuits |
Hiroshi Kawamoto, Hironobu Niijima |
1998-10-13 |
| 5757198 |
Method and apparatus for detecting an IC defect using charged particle beam |
Hiroshi Kawamoto, Hironobu Niijima |
1998-05-26 |
| 5592100 |
Method for detecting an IC defect using charged particle beam |
Hiroshi Kawamoto, Hironobu Niijima |
1997-01-07 |
| 5521517 |
Method and apparatus for detecting an IC defect using a charged particle beam |
Hironobu Niijima, Hiroshi Kawamoto |
1996-05-28 |