Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9236218 | Defect inspection apparatus and method using a plurality of detectors to generate a subtracted image that may be used to form a subtraction profile | Tsutomu Murakawa | 2016-01-12 |
| 8779359 | Defect review apparatus and defect review method | Yoshiaki Ogiso | 2014-07-15 |
| 8754935 | Microstructure inspection method, microstructure inspection apparatus, and microstructure inspection program | Hidemitsu Hakii | 2014-06-17 |
| 8604431 | Pattern-height measuring apparatus and pattern-height measuring method | Tsutomu Murakawa, Hidemitsu Hakii | 2013-12-10 |