Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12139642 | CMP slurry composition for polishing tungsten pattern wafer and method of polishing tungsten pattern wafer using the same | Eui Rang LEE, Won Jung Kim, Hyeong Mook KIM, Tae Won Park, Jong Won Lee +1 more | 2024-11-12 |
| 11560495 | CMP slurry composition for polishing tungsten pattern wafer and method of polishing tungsten pattern wafer using the same | Won Jung Kim, Tae Won Park, Eui Rang LEE, Jong Won Lee, Youn-Jin Cho | 2023-01-24 |