Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12139642 | CMP slurry composition for polishing tungsten pattern wafer and method of polishing tungsten pattern wafer using the same | Eui Rang LEE, Yoon Young KOO, Won Jung Kim, Tae Won Park, Jong Won Lee +1 more | 2024-11-12 |
| 11746258 | CMP slurry composition for copper films and method of polishing copper films using the same | Keun-Sam Jang, Dong-Hun Kang, Jong Won Lee | 2023-09-05 |