Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140869 | Line narrowed gas laser apparatus, control method therefor, electronic device manufacturing method | — | 2024-11-12 |
| 11451003 | Laser gas regenerating apparatus and electronic device manufacturing method | Hiroaki TSUSHIMA, Satoshi Tanaka, Takeshi Asayama, Osamu Wakabayashi | 2022-09-20 |
| 10673200 | Excimer laser apparatus | Hiroaki TSUSHIMA, Hiroyuki Ikeda, Osamu Wakabayashi | 2020-06-02 |