Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7944677 | Electrostatic chuck | Eitarou Morimoto, You Tanaka, Kazuaki Kaneko | 2011-05-17 |
| 6251232 | Method of removing accumulated films from the surface of substrate holders in film deposition apparatus, and film deposition apparatus | Koji Maeda | 2001-06-26 |
| 6027618 | Compact in-line film deposition system | Yo Kamikura | 2000-02-22 |
| 5846328 | In-line film deposition system | Yo Kamikura | 1998-12-08 |
| 5560586 | Main valve | Naoyuki Suzuki | 1996-10-01 |