Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6027618 | Compact in-line film deposition system | Yoshiki Aruga | 2000-02-22 |
| 5846328 | In-line film deposition system | Yoshiki Aruga | 1998-12-08 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6027618 | Compact in-line film deposition system | Yoshiki Aruga | 2000-02-22 |
| 5846328 | In-line film deposition system | Yoshiki Aruga | 1998-12-08 |