Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7395779 | Plasma processing apparatus | Nobuo Ishii, Kibatsu Shinohara | 2008-07-08 |
| 6953908 | Plasma processing apparatus | Nobuo Ishii | 2005-10-11 |
| 6910440 | Apparatus for plasma processing | Nobuo Ishii, Kibatsu Shinohara | 2005-06-28 |
| 6823816 | Plasma processing system | Nobuo Ishii | 2004-11-30 |
| 6713968 | Plasma processing apparatus | Nobuo Ishii | 2004-03-30 |
| 6695948 | Plasma processing apparatus | Nobuo Ishii | 2004-02-24 |
| 6646224 | Plasma-assisted processing system and plasma-assisted processing method | Nobuo Ishii, Makoto Ando, Naohisa Goto | 2003-11-11 |
| 6622650 | Plasma processing apparatus | Nobuo Ishii | 2003-09-23 |
| 6528752 | Plasma processing apparatus and plasma processing method | Nobuo Ishii, Makoto Ando, Naohisa Goto | 2003-03-04 |
| 6527909 | Plasma processing apparatus | Nobuo Ishii | 2003-03-04 |
| 6311638 | Plasma processing method and apparatus | Nobuo Ishii, Makoto Ando, Naohisa Goto | 2001-11-06 |