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Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #4,150,030 of 4,157,543Top 100%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
10483010 Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (VUV) light in low-oxygen environment Rafal Dylewicz, Reinhold SCHWARZENBACHER, Kenichi Sano, David Lou, Milan Pliska 2019-11-19