Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12206342 | Substrate processing apparatus | Jairo T. Moura, Karanjit Singh Saini, Robert T. Caveney, Robert C. May, Daniel Babbs | 2025-01-21 |
| 12162698 | Substrate transport apparatus | Daniel Babbs, Robert C. May | 2024-12-10 |
| 11972965 | Method and apparatus for substrate transport apparatus position compensation | Jairo T. Moura, Robert T. Caveney, Bing Yin, Nathan Spiker | 2024-04-30 |
| 11823944 | Substrate processing apparatus | Charles W. Su | 2023-11-21 |
| 11776834 | On the fly automatic wafer centering method and apparatus | Bing Yin, Jairo T. Moura, Aaron Gawlik, Nathan Spiker | 2023-10-03 |
| 11691267 | Substrate processing apparatus | Robert T. Caveney | 2023-07-04 |
| 11270904 | Substrate processing apparatus | Charles W. Su | 2022-03-08 |
| 11251059 | Method and apparatus for substrate transport apparatus position compensation | Jairo T. Moura, Robert T. Caveney, Bing Yin, Nathan Spiker | 2022-02-15 |
| 11235935 | Substrate transport apparatus | Daniel Babbs, Robert C. May | 2022-02-01 |
| 11192239 | Substrate processing apparatus | Robert T. Caveney | 2021-12-07 |
| 10978330 | On the fly automatic wafer centering method and apparatus | Bing Yin, Jairo T. Moura, Aaron Gawlik, Nathan Spiker | 2021-04-13 |
| 10651067 | Method and apparatus for substrate transport apparatus position compensation | Jairo T. Moura, Robert T. Caveney, Bing Yin, Nathan Spiker | 2020-05-12 |
| 10134623 | On the fly automatic wafer centering method and apparatus | Bing Yin, Jairo T. Moura, Aaron Gawlik, Nathan Spiker | 2018-11-20 |
| 7405396 | Sample handling mechanisms and methods for mass spectrometry | Thomas R. Cygan, Raymond P. Burke, Richard P. Gill, Roy E. Martin, Timothy Hutchins | 2008-07-29 |