VB

Victor M. Beneviste

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #3,367,405 of 4,157,543Top 85%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7435971 Ion source Bo H. Vanderberg, John F. Fallon, Ilya Pokidov 2008-10-14