Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7745329 | Tungsten nitride atomic layer deposition processes | Shulin Wang, Lee Luo, Aihua Chen, Ming Li | 2010-06-29 |
| 7429516 | Tungsten nitride atomic layer deposition processes | Shulin Wang, Lee Luo, Aihua Chen, Ming Li | 2008-09-30 |
| 7115499 | Cyclical deposition of tungsten nitride for metal oxide gate electrode | Shulin Wang, Lee Luo, Aihua Chen, Ming Li | 2006-10-03 |
| 6833161 | Cyclical deposition of tungsten nitride for metal oxide gate electrode | Shulin Wang, Lee Luo, Aihua Chen, Ming Li | 2004-12-21 |