Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7081963 | Substrate holder, and use of the substrate holder in a highly accurate measuring instrument | Carola Blaesing-Bangert | 2006-07-25 |
| 6960755 | Contact sensor, and apparatus for protecting a protruding component | — | 2005-11-01 |
| 6919658 | Coordinate measuring stage | — | 2005-07-19 |
| 6816253 | Substrate holder, and use of the substrate holder in a highly accurate measuring instrument | Carola Blaesing-Bangert | 2004-11-09 |
| 6816263 | Interferometric measurement apparatus for wavelength calibration | Klaus Rinn | 2004-11-09 |
| 6778260 | Coordinate measuring stage and coordinate measuring instrument | Carola Blaesing-Bangert | 2004-08-17 |
| 6441899 | Apparatus and method for loading substrates of various sizes into substrate holders | Carola Blaesing-Bangert | 2002-08-27 |
| 6441911 | Measuring instrument and method for measuring patterns on substrates of various thicknesses | — | 2002-08-27 |
| 6438856 | Apparatus for fine positioning of a component, and coordinate measuring machine having an apparatus for fine positioning of a component | — | 2002-08-27 |
| 6377870 | Device and method for delivering various transparent substrates into a high-precision measuring instrument | Carola Blaesing-Bangert | 2002-04-23 |
| 6347458 | Displaceable X/Y coordinate measurement table | — | 2002-02-19 |
| 6323953 | Method and device for measuring structures on a transparent substrate | Carola Blaesing-Bangert, Klaus Rinn, Mathias Beck | 2001-11-27 |
| 6236503 | Microscope stand for a wafer inspection microscope | Roland Hedrich | 2001-05-22 |
| 5315080 | Limit switching apparatus with defined overtravel for specimen protection on microscopes with motorized focusing drive | Roland Hedrich | 1994-05-24 |
| 4871290 | Automatic handling apparatus for plate-shaped objects | Peter Schmidt, Hans-Helmut Paul | 1989-10-03 |