| 7926509 |
Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method |
Tadahiro Ohmi, Kazuhiko Sugiyama, Kenetu Mizusawa, Eiji Takahashi, Kouji Nishino +3 more |
2011-04-19 |
| 7798167 |
Internal pressure controller of chamber and internal pressure subject-to-control type chamber |
Tadahiro Ohmi, Akniobu Teramoto, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura +3 more |
2010-09-21 |
| 7594517 |
Gas supply facility of a chamber and a method for an internal pressure control of the chamber for which the facility is employed |
Hiroshi Kannan, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura, Atsushi Matsumoto +1 more |
2009-09-29 |
| 7367241 |
Differential pressure type flowmeter and differential pressure type flow controller |
Tadahiro Ohmi, Kazuhiko Sugiyama, Nobukazu Ikeda, Kouji Nishino, Osamu Nakamura +2 more |
2008-05-06 |
| 7219533 |
Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method |
Tadahiro Ohmi, Masaaki Nagase, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura +1 more |
2007-05-22 |
| 7085628 |
Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus |
Tadahiro Ohmi, Osamu Nakamura, Nobukazu Ikeda, Ryousuke Dohi, Kouji Nishino +2 more |
2006-08-01 |
| 6964279 |
Pressure-type flow rate control apparatus |
Tadahiro Ohmi, Osamu Nakamura, Nobukazu Ikeda, Ryousuke Dohi, Kouji Nishino +5 more |
2005-11-15 |
| 6848470 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus |
Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more |
2005-02-01 |
| 6820632 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus |
Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more |
2004-11-23 |
| 6450190 |
Method of detecting abnormalities in flow rate in pressure-type flow controller |
Tadahiro Ohmi, Seiichi Iida, Satoshi Kagatsume, Jun Hirose, Kazuo Fukasawa +6 more |
2002-09-17 |
| 6422264 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus |
Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more |
2002-07-23 |
| 6394415 |
Fluid control valve and fluid supply/exhaust system |
Tadahiro Ohmi, Migaku Takahashi, Michio Yamaji, Tsuyoshi Tanikawa, Nobukazu Ikeda +5 more |
2002-05-28 |
| 6302130 |
Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers |
Tadahiro Ohmi, Seiichi Iida, Satoshi Kagatsume, Jun Hirose, Kouji Nishino +7 more |
2001-10-16 |
| 6289923 |
Gas supply system equipped with pressure-type flow rate control unit |
Tadahiro Ohmi, Satoshi Kagatsume, Nobukazu Ikeda, Kouji Nishino, Kazuhiro Yoshikawa +3 more |
2001-09-18 |
| 6193212 |
Fluid control valve and fluid supply/exhaust system |
Tadahiro Ohmi, Migaku Takahashi, Michio Yamaji, Tsuyoshi Tanikawa, Nobukazu Ikeda +5 more |
2001-02-27 |
| 6158679 |
Orifice for pressure type flow rate control unit and process for manufacturing orifice |
Tadahiro Ohmi, Tetu Kagazume, Kazuhiko Sugiyama, Osamu Fukada, Susumu Ozawa +6 more |
2000-12-12 |
| 6152168 |
Pressure-type flow rate control apparatus |
Tadahiro Ohmi, Tetu Kagazume, Kazuhiko Sugiyama, Ryousuke Dohi, Kouji Nishino +3 more |
2000-11-28 |