Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8033770 | Vacuum processing apparatus | Takeshi Oono, Kenji Nakata, Shoji Okiguchi, Hidehiro Oomae, Shigeharu Minami +1 more | 2011-10-11 |
| 7862289 | Vacuum processing apparatus and vacuum processing method | Takeshi Oono, Kenji Nakata, Shoji Okiguchi, Hidehiro Oomae, Shigeharu Minami +1 more | 2011-01-04 |
| 7476073 | Vacuum processing method | Takeshi Oono, Kenji Nakata, Shoji Okiguchi, Hidehiro Oomae, Shigeharu Minami +1 more | 2009-01-13 |
| 6920369 | Methods of operating vacuum processing equipment and methods of processing wafers | Shigeru Nakamoto, Shoji Okiguchi, Hideki Yamasaki, Kouji Nishihata | 2005-07-19 |
| 6795745 | Methods of operating vacuum processing equipment and methods of processing wafers | Shigeru Nakamoto, Shoji Okiguchi, Hideki Yamasaki, Kouji Nishihata | 2004-09-21 |