Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11429409 | Software emulator for hardware components in a gas delivery system of substrate processing system | Bostjan Pust, Chung-Ho Huang | 2022-08-30 |
| 10761517 | Extracting real-time data from EtherCAT sensor bus in a substrate processing system | Behzad Lajevardi, Willie Ku, Henry T. Chan | 2020-09-01 |