Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761517 | Extracting real-time data from EtherCAT sensor bus in a substrate processing system | Behzad Lajevardi, Tom Trinh, Henry T. Chan | 2020-09-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761517 | Extracting real-time data from EtherCAT sensor bus in a substrate processing system | Behzad Lajevardi, Tom Trinh, Henry T. Chan | 2020-09-01 |