Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7615462 | Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack | Sarah Kim, R. Scott List | 2009-11-10 |
| 7148565 | Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack | Sarah Kim, R. Scott List | 2006-12-12 |
| 6645832 | Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack | Sarah Kim, R. Scott List | 2003-11-11 |