Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632743 | Post-planarization, pre-oxide removal ozone treatment | Eric K. Grieger, Robert H. Whitney, Gunnar A. Barnhart | 2003-10-14 |
| 6100198 | Post-planarization, pre-oxide removal ozone treatment | Eric K. Grieger, Robert H. Whitney, Gunnar A. Barnhart | 2000-08-08 |