Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811355 | Methods of forming semiconductor devices | William R. Brown, Jenna L. Russon, Brian R. Watson, Nikolay A. Mirin, David A. Kewley | 2020-10-20 |
| 10388601 | Semiconductor devices including conductive lines and methods of forming the semiconductor devices | William R. Brown, Jenna L. Russon, Brian R. Watson, Nikolay A. Mirin, David A. Kewley | 2019-08-20 |
| 9911693 | Semiconductor devices including conductive lines and methods of forming the semiconductor devices | William R. Brown, Jenna L. Russon, Brian R. Watson, Nikolay A. Mirin, David A. Kewley | 2018-03-06 |
| 8658336 | Methods of correcting for variation across substrates during photolithography | Yuan He, Scott L. Light | 2014-02-25 |
| 6914017 | Residue free overlay target | Pary Baluswamy, Scott DeBoer, Ceredig Roberts | 2005-07-05 |
| 6822342 | Raised-lines overlay semiconductor targets and method of making the same | Pary Baluswamy, Scott DeBoer, Ceredig Roberts | 2004-11-23 |
| 6675053 | Layout for measurement of overlay error | Pary Baluswamy | 2004-01-06 |
| 6484060 | Layout for measurement of overlay error | Pary Baluswamy | 2002-11-19 |
| 5952045 | Method and apparatus for improved coating of a semiconductor wafer | — | 1999-09-14 |