Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10229814 | Plasma processing apparatus | Tomohiro Okumura, Hiroshi Kawaura | 2019-03-12 |
| 10147585 | Plasma processing apparatus | Tomohiro Okumura, Hiroshi Kawaura | 2018-12-04 |
| 8802567 | Plasma processing method | Tomohiro Okumura, Ichiro Nakayama, Hiroshi Kawaura | 2014-08-12 |
| 8624340 | Plasma processing apparatus and method thereof | Tomohiro Okumura, Ichiro Nakayama, Hiroshi Kawaura | 2014-01-07 |
| 7666793 | Method of manufacturing amorphous metal oxide film and methods of manufacturing capacitance element having amorphous metal oxide film and semiconductor device | Kiwamu Adachi, Satoshi Horiuchi | 2010-02-23 |
| 6916747 | Method of manufacturing amorphous metal oxide film and methods of manufacturing capacitance element having amorphous metal oxide film and semiconductor device | Kiwamu Adachi, Satoshi Horiuchi | 2005-07-12 |