Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6269322 | System and method for wafer alignment which mitigates effects of reticle rotation and magnification on overlay | Michael K. Templeton, Bharath Rangarajan, Kathleen R. Early | 2001-07-31 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6269322 | System and method for wafer alignment which mitigates effects of reticle rotation and magnification on overlay | Michael K. Templeton, Bharath Rangarajan, Kathleen R. Early | 2001-07-31 |