Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494873 | Asymmetry compensation method used in lithography overlay process | En-Chiuan Liou, Yuan-Chi Pai, Chun-Chi Yu | 2016-11-15 |
| 9482964 | Overlap mark set and method for selecting recipe of measuring overlap error | En-Chiuan Liou, Chia-Chang Hsu, Yi-Ting Chen, Chun-Chi Yu | 2016-11-01 |
| 9448471 | Photo-mask and method of manufacturing semiconductor structures by using the same | En-Chiuan Liou, Yu-Cheng Tung, Yuan-Chi Pai, Chun-Chi Yu | 2016-09-20 |
| 9400435 | Method of correcting overlay error | En-Chiuan Liou, Chia-Chang Hsu, Chia-Hung Wang, Tuan-Yen Yu, Yuan-Chi Pai +1 more | 2016-07-26 |
| 9305884 | Overlay mark and method for forming the same | En-Chiuan Liou, Yi-Ting Chen | 2016-04-05 |