Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5209813 | Lithographic apparatus and method | Yoshitada Oshida, Genya Matsuoka, Toshio Kaneko, Hiroyuki Takahashi, Hiroyoshi Ando +2 more | 1993-05-11 |
| 5166529 | Electron beam lithography system | Hiroyoshi Ando, Genya Matsuoka, Hiroyuki Takahashi, Hidenori Yamaguchi | 1992-11-24 |
| 4445040 | Shaping aperture for a charged particle forming system | Norio Saitou, Akira Yanagisawa | 1984-04-24 |