Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9891539 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Hiroyuki Nagasaka | 2018-02-13 |
| 9429851 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Hiroyuki Nagasaka | 2016-08-30 |
| 9360763 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Hiroyuki Nagasaka | 2016-06-07 |
| 9310696 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Hiroyuki Nagasaka | 2016-04-12 |
| 8854601 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Hiroyuki Nagasaka | 2014-10-07 |