Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11628534 | Silicon wafer single-side polishing method | Toshiharu Nakajima, Kazuaki Kozasa, Katsuhisa SUGIMORI | 2023-04-18 |
| 9991110 | Method for manufacturing semiconductor wafer | Kazuaki Kozasa, Katsuhisa SUGIMORI | 2018-06-05 |
| 9956663 | Method for polishing silicon wafer | Kazuaki Kozasa, Katsuhisa SUGIMORI | 2018-05-01 |