Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061338 | High-resolution position encoder with image sensor and encoded target pattern | Jonathan K. Wells, Paul Derek Coon, Matthew Rosa, Johnathan Agustin Marquez, Michael Binnard +3 more | 2021-07-13 |
| 10871708 | Spatial-frequency matched wafer alignment marks, wafer alignment and overlay measurement and processing using multiple different mark designs on a single layer | Stephen P. Renwick | 2020-12-22 |
| 9639003 | Programmable imaging assembly for manufacturing biotest post arrays | — | 2017-05-02 |
| 8300214 | System and method for an adjusting optical proximity effect for an exposure apparatus | Stephen P. Renwick | 2012-10-30 |
| 8027813 | Method and system for reconstructing aberrated image profiles through simulation | — | 2011-09-27 |
| 6943882 | Method to diagnose imperfections in illuminator of a lithographic tool | Stephen P. Renwick | 2005-09-13 |
| 6025099 | Field curvature correction utilizing smoothly curved chuck for substrate exposure in electronics manufacturing | — | 2000-02-15 |