Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162119 | Micro-beam shaping optics (MBSO) | James G. Ho | 2018-12-25 |
| 8922877 | Polarization control with mode stability | Gregory D. Goodno, Peter Thielen, Joshua E. Rothenberg, Marty Wacks | 2014-12-30 |
| 6933515 | Laser-produced plasma EUV light source with isolated plasma | Jeffrey S. Hartlove, Mark E. Michaelian, Henry Shields, Steven W. Fornaca, Fernando Martos +1 more | 2005-08-23 |