Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8502173 | System and method for ion implantation with improved productivity and uniformity | Bo H. Vanderberg, Andy Ray | 2013-08-06 |
| 8278634 | System and method for ion implantation with improved productivity and uniformity | Bo H. Vanderberg, Andy Ray | 2012-10-02 |