Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10223494 | Semiconductor device manufacturing method and mask manufacturing method | Ji-Soong Park, Suk Ho Lee, Jung-wook Shon | 2019-03-05 |
| 9709893 | Exposure method using electron beam and substrate manufacturing method using the same | Sook Hyun Lee, Shuichi Tamamushi, Inkyun SHIN, Jin Choi | 2017-07-18 |