Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824861 | Substrate processing apparatus, substrate processing method and recording medium recording substrate processing program | Masahiro Numakura, Yoshikazu Ishikawa, Toshihiko Hamada, Junya Sato, Toshiyuki Kobayashi | 2017-11-21 |
| 8280852 | System, method and storage medium for controlling a processing system | Hiroshi Nakamura, Wataru Nakagomi | 2012-10-02 |