Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424502 | Substrate transfer device and bonding system | Masataka Matsunaga, Takahiro Masunaga, Takashi Koga, Yasuharu Iwashita, Masaaki Umitsuki +2 more | 2019-09-24 |
| 7934880 | Coating and developing apparatus, coating and developing method, and storage medium | Yoshitaka Hara | 2011-05-03 |
| 7645081 | Coating and developing apparatus, coating and developing method, and storage medium | Yoshitaka Hara | 2010-01-12 |