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Layout correction algorithms for removing stress and other physical effect induced process deviation |
Xiao-Jie Yuan, Daniel Gitlin |
2006-04-18 |
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Mask-alignment detection circuit in X and Y directions |
Kevin T. Look |
2005-04-12 |
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Mask alignment structure for IC layers |
Kevin T. Look |
2004-04-06 |
| 6684520 |
Mask-alignment detection circuit in x and y directions |
Kevin T. Look |
2004-02-03 |
| 6569576 |
Reticle cover for preventing ESD damage |
Kevin T. Look, Jonathan Ho |
2003-05-27 |
| 6563320 |
Mask alignment structure for IC layers |
Kevin T. Look |
2003-05-13 |
| 6465305 |
Methods and circuits employing threshold voltages for mask-alignment detection |
Kevin T. Look |
2002-10-15 |
| 6436726 |
Methods and circuits for mask-alignment detection |
Kevin T. Look |
2002-08-20 |
| 6426534 |
Methods and circuits employing threshold voltages for mask-alignment detection |
Kevin T. Look |
2002-07-30 |
| 6393714 |
Resistor arrays for mask-alignment detection |
Kevin T. Look |
2002-05-28 |
| 6305095 |
Methods and circuits for mask-alignment detection |
Kevin T. Look |
2001-10-23 |