Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715628 | Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same | Jeongil Mun, Kyeonghun Kim, Taekyoon PARK, Jongwoo Sun, Yongseok Lee +2 more | 2023-08-01 |
| 11264291 | Sensor device and etching apparatus having the same | Jeongil Mun, Hyungjoo Lee, Kyoungsuk Kim, Kyeonghun Kim, Jongwoo Sun | 2022-03-01 |