Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318359 | Apparatus for substrate treatment and heating apparatus | Il-Hwan Lim, Jang Woo Shim, Chul Soo Kim | 2016-04-19 |
| 9117858 | Heater block and heat treatment apparatus having the same | Il-Hwan Lim, Jang Woo Shim, Chul Soo Kim | 2015-08-25 |