Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6874516 | Substrate cleaning apparatus | Kousaku Matsuno, Masao Iga, Takeji Ueda, Jun Kanayasu | 2005-04-05 |
| 6767124 | Slurry mixing feeder and slurry mixing and feeding method | Masato Kawasaki | 2004-07-27 |
| 6722055 | Supporting fixture of substrate and drying method of substrate surface using the same | — | 2004-04-20 |
| 5523518 | Recycling of waste sulfuric acid | Hitoshi Satoh | 1996-06-04 |