Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6983756 | Substrate treatment process and apparatus | Kousaku Matsuno | 2006-01-10 |
| 6874516 | Substrate cleaning apparatus | Kousaku Matsuno, Takeji Ueda, Jun Kanayasu, Satoshi Shikami | 2005-04-05 |
| 6743301 | Substrate treatment process and apparatus | Kousaku Matsuno | 2004-06-01 |
| 6024045 | Apparatus for fabricating semiconductor device and method for fabricating semiconductor device | Jun Kikuchi, Shuzo Fujimura | 2000-02-15 |
| 5919336 | Apparatus for fabricating semiconductor device and method for fabricating semiconductor device | Jun Kikuchi, Shuzo Fujimura | 1999-07-06 |